About: http://webisa.webdatacommons.org/9845225

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Control of substrate temperature is said to allow non-conformal coverage of stepped surfaces such as trenches or vias.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr