About: http://webisa.webdatacommons.org/98563480

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates to semiconductor devices, such as flash memory devices, more particularly to a method and system for reducing removal of the antireflective-coating by condensing the ARC layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es