About: http://webisa.webdatacommons.org/98631951

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a method for removing the asperities, typically the ridge-shaped SiO2 protuberances (so-called bird's heads") resulting from the ROI process at the surface of the silicon substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es