About: http://webisa.webdatacommons.org/98679251

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method as recited in claim 1 further including planarizing at least a portion of the first electrode layer to form a planarized first electrode layer prior to forming the ferroelectric dielectric layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr