About: http://webisa.webdatacommons.org/98822878

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The cleaning method according to claim 2, wherein the predetermined distance from the center of the substrate is 50 mm or above if the substrate is a semiconductor wafer of a diameter not smaller than 8 in.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com