About: http://webisa.webdatacommons.org/98906285

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The oxygen or nitrogen react with silicon 110 to form dielectrics such as silicon oxides, silicon nitrides, or oxynitrides.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au