About: http://webisa.webdatacommons.org/98921970

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates, generally, to systems for polishing or planarizing workpieces, such as semiconductor wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es