About: http://webisa.webdatacommons.org/98992136

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first dielectric layer can comprise a material such as silicon dioxide doped with boron or phosphorous, or a polyimide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com