About: http://webisa.webdatacommons.org/99017267

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This study provides an updated review of sputtering technology and a description of various types of sputtering targets,...
http://www.w3.org/ns/prov#wasQuotedFrom	bccresearch.com