About: http://webisa.webdatacommons.org/99507945

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 1, an isolation layer pattern 104 is formed on an integrated circuit substrate 100 that may include a semiconductor material such as single crystalline silicon, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com