About: http://webisa.webdatacommons.org/99619857

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Deposition methods such as CVD, sputtering or spin coating may be used in forming the sacrificial layer 115.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au