About: http://webisa.webdatacommons.org/99675442

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 6, the substrate 110 is etched through the patterned material layer 120 to form a plurality of trenches, using a suitable etching process including a dry etch or a wet etch.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr