About: http://webisa.webdatacommons.org/99870013

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A description will now be given of an example of a fabrication system for semiconductor devices (for example, semiconductor chips such as ICs and LSIs, liquid crystal panels, CCDS, thin-film magnetic heads, and micromachines).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com