About: http://webisa.webdatacommons.org/9991567

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a process such as etching may be utilized to remove substrate material and laser machining may be utilized to remove additional substrate material to form a desired feature such as a slot.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com