About: http://webisa.webdatacommons.org/9992106

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a metal layer, such as Ti, Pt, Co, W, Ni, Pd, Cr etc, is sputtered on the substrate 2 and gate region 20.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com