Head noun: planarization
| Same concepts |
|---|
| http://dbpedia.org/resource/Planarization |
Broader concepts
| label | provenance | confidence |
|---|---|---|
| process | isap:477756127 | 0.441481 |
| procedure | isap:22033027 | 0.336630 |
| substrate | isap:21893941 | 0.258078 |
| method | isap:53338677 | 0.197168 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| cmp | isap:278212154 | 0.288881 |