About: arf excimer laser

Premodifier: arf excimer
Head noun: laser

Same concepts

Broader concepts

label	provenance	confidence
light source	isap:164735731	0.834091
excimer laser	isap:375100953	0.595301
laser	isap:375101015	0.572709
present invention	isap:339919858	0.477648
nm	isap:239762125	0.273738

Narrower concepts

label	provenance	confidence