About: chemical vapor deposition method

Premodifier: chemical vapor deposition
Head noun: method

Same concepts

Broader concepts

label	provenance	confidence
method	isap:387627753	0.784177
technique	isap:425618905	0.424751

Narrower concepts

label	provenance	confidence
mocvd	isap:161852656	0.407636
method	isap:387628911	0.261416