About: chemical vapour deposition

Premodifier: chemical vapour
Head noun: deposition

Same concepts
http://dbpedia.org/resource/Chemical_vapor_deposition

Broader concepts

label	provenance	confidence
technique	isap:191924721	0.446698
process	isap:219679968	0.429341
art	isap:401120294	0.313653

Narrower concepts

label	provenance	confidence