About: chemical-mechanical polishing cmp

Premodifier: chemical-mechanical polishing
Head noun: cmp

Same concepts

Broader concepts

label	provenance	confidence
technique	isap:261881301	0.712501
process	isap:233684189	0.685796
planarized	isap:238944950	0.462626
method	isap:212225953	0.370094

Narrower concepts

label	provenance	confidence