About: chemical-mechanical polishing

Premodifier: chemical-mechanical
Head noun: polishing

Same concepts
http://dbpedia.org/resource/Chemical-mechanical_planarization

Broader concepts

label	provenance	confidence
conventional technique	isap:351252822	0.758625
planarization technique	isap:351252825	0.669092
planarize back	isap:148860810	0.653628
polishing	isap:352329514	0.574417
planarisation	isap:507483867	0.557663
planarized	isap:44046131	0.482028
process	isap:27715443	0.481577

Narrower concepts

label	provenance	confidence