About: deposition parameter

Premodifier: deposition
Head noun: parameter

Same concepts

Broader concepts

label	provenance	confidence

Narrower concepts

label	provenance	confidence
substrate temperature	isap:277576424	0.744065
deposition temperature	isap:277576541	0.739184
gas flow	isap:289498654	0.716129
rate of deposition	isap:285847678	0.585594
pressure	isap:183775703	0.505915