About: e-beam lithography

Premodifier: e-beam
Head noun: lithography

Same concepts
http://dbpedia.org/resource/Electron-beam_lithography

Broader concepts

label	provenance	confidence
technique	isap:277806313	0.753194
application	isap:130802489	0.672537
process	isap:138762053	0.502938
nanoscience	isap:129834572	0.498688
method	isap:142479641	0.498374

Narrower concepts

label	provenance	confidence