Premodifier: electrostaticHead noun: chuck
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| electrostatic chuck | isap:369493864 | 0.646805 |
| means | isap:375389695 | 0.614155 |
| apparatus | isap:339258029 | 0.575369 |
| chuck | isap:369493873 | 0.377836 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| electrostatic chuck | isap:369493864 | 0.646805 |
| chuck | isap:369493862 | 0.185955 |