About: euv lithography

Premodifier: euv
Head noun: lithography

Same concepts
http://dbpedia.org/resource/Extreme_ultraviolet_lithography

Broader concepts

label	provenance	confidence
lithography	isap:130680213	0.484801
approach	isap:463670953	0.463104
application	isap:130802487	0.412205

Narrower concepts

label	provenance	confidence