Premodifier: gas phaseHead noun: process
| Same concepts | 
|---|
Broader concepts
| label | provenance | confidence | 
|---|---|---|
| polymerization process | isap:433845612 | 0.526645 | 
Narrower concepts
| label | provenance | confidence | 
|---|---|---|
| cvd | isap:235951276 | 0.448679 | 
| process | isap:433845567 | 0.378136 |