About: ion beam etching

Premodifier: ion beam
Head noun: etching

Same concepts
http://dbpedia.org/resource/Ion_beam

Broader concepts

label	provenance	confidence
known etching technique	isap:318270338	0.754529
method	isap:267663004	0.645373
process	isap:438669745	0.643109
technique	isap:318270249	0.615390

Narrower concepts

label	provenance	confidence