About: optical lithography

Premodifier: optical
Head noun: lithography

Same concepts
http://dbpedia.org/resource/Photolithography

Broader concepts

label	provenance	confidence
standard micromachining technique	isap:277806361	0.811465
technique	isap:277806352	0.593519
process	isap:138762050	0.478993
patterned	isap:277052796	0.386807
pattern	isap:137865018	0.363958

Narrower concepts

label	provenance	confidence