Premodifier: patterningHead noun: device
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| radiation source | isap:386916826 | 0.460608 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| layer alignment axis | isap:301146244 | 0.634989 |
| mask | isap:308515870 | 0.282724 |