About: phase shift mask

Premodifier: phase shift
Head noun: mask

Same concepts
http://dbpedia.org/resource/Phase-shift_mask

Broader concepts

label	provenance	confidence
type of mask	isap:168800556	0.503988
method	isap:307656224	0.444287
phase	isap:85784525	0.437336

Narrower concepts

label	provenance	confidence
present invention	isap:152031127	0.410394
substrate	isap:150441607	0.328384
mask	isap:170511583	0.239726