Premodifier: photolithographicHead noun: process
Same concepts |
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Broader concepts
label | provenance | confidence |
---|---|---|
known process | isap:433846042 | 0.819165 |
process | isap:433845579 | 0.797373 |
art | isap:508853114 | 0.555126 |
Narrower concepts
label | provenance | confidence |
---|---|---|
photoresist layer | isap:222184641 | 0.717948 |