Premodifier: photolithographicHead noun: process
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| known process | isap:433846042 | 0.819165 |
| process | isap:433845579 | 0.797373 |
| art | isap:508853114 | 0.555126 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| photoresist layer | isap:222184641 | 0.717948 |