Premodifier: process gas controlHead noun: subroutine
| Same concepts |
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Broader concepts
| label | provenance | confidence |
|---|---|---|
| process chamber component subroutine | isap:400115352 | 0.822776 |
| chamber component subroutine | isap:400115350 | 0.790051 |
| liquid precursor | isap:192085513 | 0.604592 |
Narrower concepts
| label | provenance | confidence |
|---|