About: process gas control subroutine

Premodifier: process gas control
Head noun: subroutine

Same concepts

Broader concepts

label	provenance	confidence
process chamber component subroutine	isap:400115352	0.822776
chamber component subroutine	isap:400115350	0.790051
liquid precursor	isap:192085513	0.604592

Narrower concepts

label	provenance	confidence