Premodifier: processingHead noun: chamber
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| processing chamber | isap:431052977 | 0.792936 |
| substrate | isap:320585859 | 0.569785 |
| chamber | isap:431053018 | 0.463041 |
| plasma | isap:265701986 | 0.454569 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| processing chamber | isap:431052977 | 0.792936 |
| etch chamber | isap:431053130 | 0.698241 |
| chamber | isap:431053020 | 0.545785 |
| showerhead | isap:218723736 | 0.352738 |
| example | isap:432598838 | 0.318929 |
| vapor | isap:223525036 | 0.261424 |