Premodifier: rfHead noun: sputtering
Same concepts |
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Broader concepts
label | provenance | confidence |
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deposition technique | isap:192222496 | 0.726638 |
technique | isap:192222499 | 0.637077 |
variety of technique | isap:219953466 | 0.636576 |
Narrower concepts
label | provenance | confidence |
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