About: semiconductor fabrication

Premodifier: semiconductor
Head noun: fabrication

Same concepts
http://dbpedia.org/resource/Semiconductor_device_fabrication

Broader concepts

label	provenance	confidence
industrial process	isap:139728975	0.808306
industry	isap:462181051	0.799291
application	isap:130572454	0.702593
manufacturing process	isap:139728962	0.652704
high resolution	isap:312982082	0.505048
process	isap:139728959	0.502653
invention	isap:277326165	0.121383

Narrower concepts

label	provenance	confidence
deposition	isap:314946566	0.434057
method	isap:453406681	0.224000