Premodifier: shallow trenchHead noun: isolation
| Same concepts |
|---|
| http://dbpedia.org/resource/Shallow_trench_isolation |
Broader concepts
| label | provenance | confidence |
|---|---|---|
| isolation structure | isap:351734728 | 0.783602 |
| isolation technique | isap:352858279 | 0.691713 |
| process | isap:28769587 | 0.505382 |
| dielectric material | isap:410432811 | 0.470559 |
| technique | isap:352858274 | 0.453839 |
Narrower concepts
| label | provenance | confidence |
|---|