About: silicon oxynitride film

Premodifier: silicon oxynitride
Head noun: film

Same concepts

Broader concepts

label	provenance	confidence
film contain silicon	isap:177646585	0.790206
silicon nitride film	isap:177648161	0.682137
film	isap:177646549	0.603173
layer	isap:85799659	0.334042

Narrower concepts

label	provenance	confidence
interlayer insulate film	isap:503409757	0.568796
present invention	isap:149905123	0.333962