Premodifier: substrateHead noun: carrier
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| size substrate carrier | isap:434657002 | 0.732954 |
| single substrate carrier | isap:434657069 | 0.671537 |
| apparatus | isap:319810926 | 0.382024 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| foup | isap:2622675 | 0.406350 |
| substrate | isap:23981121 | 0.233050 |