Premodifier: substrateHead noun: carrier
Same concepts |
---|
Broader concepts
label | provenance | confidence |
---|---|---|
size substrate carrier | isap:434657002 | 0.732954 |
single substrate carrier | isap:434657069 | 0.671537 |
apparatus | isap:319810926 | 0.382024 |
Narrower concepts
label | provenance | confidence |
---|---|---|
foup | isap:2622675 | 0.406350 |
substrate | isap:23981121 | 0.233050 |