About: surface micromachining

Premodifier: surface
Head noun: micromachining

Same concepts
http://dbpedia.org/resource/Surface_micromachining

Broader concepts

label	provenance	confidence
process	isap:299540205	0.461459
technique	isap:502478856	0.443097
method	isap:54476593	0.422718

Narrower concepts

label	provenance	confidence