About: vacuum processing apparatus

Premodifier: vacuum processing
Head noun: apparatus

Same concepts

Broader concepts

label	provenance	confidence
vacuum processing apparatus	isap:352555240	0.587713
apparatus	isap:352555616	0.368732

Narrower concepts

label	provenance	confidence
vacuum processing apparatus	isap:352555240	0.587713
apparatus	isap:352555113	0.397200