Premodifier: waferHead noun: w
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| cassette c | isap:516270733 | 0.626558 |
| treatment unit | isap:215537088 | 0.441883 |
| number of wafer w | isap:54254497 | 0.430963 |
| object | isap:54778799 | 0.362628 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| flow rate | isap:476656076 | 0.454291 |