Description
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owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
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About:
isa:103146549
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An Entity of Type :
prov:Entity
, within Data Space :
wifo5-40.informatik.uni-mannheim.de:8890
associated with source
dataset(s)
Type:
prov:Entity
New Facets Session with This Class
Attributes
Values
rdf:type
prov:Entity
prov:value
Sidewall spacers are not known to be used on the sides of metal lines that interconnect the devices or other lines or to control etching of barrier layer after forming interconnect lines thereon, e.g., by additive deposition.
prov:wasQuotedFrom
google.com.au
is
prov:wasDerivedFrom
of
isap:490713612
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