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  • In photochemical vapor deposition (chemical vapor deposition, which will be referred to as CVD hereafter), light energy such as a laser beam and an ultraviolet light is used as an energy source for CVD. An excimer laser or a carbon dioxide gas laser is generally employed as the laser, while a low-pressure mercury lamp, a high-pressure mercury lamp, or a deuterium lamp is used as an ultraviolet lig
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