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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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rdf:type
prov:value
  • An apparatus for depositing two or more PVD seed layers over a substrate, the substrate including a patterned insulating layer which comprises at least one opening surrounded by a field, the at least one opening having sidewalls, top corners, and bottom, and the apparatus comprising:
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is prov:wasDerivedFrom of
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