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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • Particularly, in the case of wafers of such large diameters as 300 mm and 400 mm or more, the wafer spacing in the upper part is increased greatly with increase in the inclination angles and it is not an easy matter for the construction of apparatus for supplying a uniform reaction gas as a laminar flow.
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