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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • The method of claim 28, wherein: in the step of vaporizing, the chamber is a cavity formed in a backing, the cavity adjoining a thin-film substrate; the orifice is a passage through the thin-film substrate; and a thin-film resister vaporizes the portion of cooling fluid. 31.
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