About: isa:75911219   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • When an abnormal condition occurs while the wafer processing is in progress and the operator is alerted via the warning means such as an alarm, the operator is allowed to choose to retry the wafer processing or halt the wafer processing instead of shifting into the maintenance mode in a selection screen displayed at the display means 240.
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software