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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • When defect such as scratch or foreign particle in which one coordinate corresponds to the other coordinate is found, the defect and foreign particle are distinguished from each other by the largeness of the detected value while whether the defect or foreign particle is serious or not is determined by the detected signal level.
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