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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • In still other embodiments, such as embodiments that result in reduced mass, substrates of virtually any appropriate thickness may be thinned to less than 40 ??m, less than 35 ??m, less than 30 ??m, less than 25 ??m, less than 20 ??m, less than 15 ??m, less than 10 ??m, or less than 5 ??m.
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