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An Entity of Type : prov:Entity, within Data Space : wifo5-40.informatik.uni-mannheim.de:8890 associated with source dataset(s)

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  • Another typical inspection object 1 including a defect such as a foreign particle to be detected is a semiconductor wafer 1 b on which chips 1 ba each to be produced typically as a microcomputer LSI are laid out 2-dimensionally at predetermined intervals as shown in FIG. 2.
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